TA2 Facility 28 – Nano Secondary Ion Mass Spectrometer (South Korea)
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TA2 Facility 28 – Nano Secondary Ion Mass Spectrometer (South Korea)

Average visit: 7 days

Features:

  • P- Primary Ion : Cs+, O2+, O
  • Smaller beam size to spatial resolution: 50nm
  • Cs+ : 50 nm, O : 200 nm
  • Mass range: 1 to 360 amu
  • High mass resolution: M/dM > 5000
  • Detection limits: ppb ~ ppm levels
  • Five masses parallel detection

Application:

  • Element distribution analysis of cathode, anode materials
  • Depth profiles of impurities in the micro patterns for semiconductors
  • Element distribution analysis of grain boundary segregation in steel
  • High-sensitivity imaging of light elements (including hydrogen)

Contact:

Dr. Keewook Yi, KBSI

Email: kyi[at]kbsi.re.kr

Website: WOLF portal information


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