TA2 Facility 29 – Nano Secondary Ion Mass Spectrometer (South Korea)
Average visit: 7 days
Features:
- P- Primary Ion : Cs+, O2+, O–
- Smaller beam size to spatial resolution: 50nm
- Cs+ : 50 nm, O– : 200 nm
- Mass range: 1 to 360 amu
- High mass resolution: M/dM > 5000
- Detection limits: ppb ~ ppm levels
- Five masses parallel detection
Application:
- Element distribution analysis of cathode, anode materials
- Depth profiles of impurities in the micro patterns for semiconductors
- Element distribution analysis of grain boundary segregation in steel
- High-sensitivity imaging of light elements (including hydrogen)
Contact:
Dr. Keewook Yi, KBSI
Email: kyi[at]kbsi.re.kr
Website: WOLF portal information
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