TA2 Facility 29 – Nano Secondary Ion Mass Spectrometer (South Korea) – Europlanet Society

TA2 Facility 29 – Nano Secondary Ion Mass Spectrometer (South Korea)

TA2 Facility 29 – Nano Secondary Ion Mass Spectrometer (South Korea)

Average visit: 7 days

Features:

P- Primary Ion : Cs⁺, O₂⁺, O^–
Smaller beam size to spatial resolution: 50nm
Cs⁺ : 50 nm, O^– : 200 nm
Mass range: 1 to 360 amu
High mass resolution: M/dM > 5000
Detection limits: ppb ~ ppm levels
Five masses parallel detection

Application:

Element distribution analysis of cathode, anode materials
Depth profiles of impurities in the micro patterns for semiconductors
Element distribution analysis of grain boundary segregation in steel
High-sensitivity imaging of light elements (including hydrogen)

Contact:

Dr. Keewook Yi, KBSI

Email: kyi[at]kbsi.re.kr

Website: WOLF portal information

TA2 Facility 29 – Nano Secondary Ion Mass Spectrometer (South Korea). Credit: Korea Basic Science Institute (KBSI).

TA2 Facility 29 – Nano Secondary Ion Mass Spectrometer (South Korea). Credit: Korea Basic Science Institute (KBSI).

Report summaries of TA visits to facility

22-EPN3-054: Searching for Biosignatures in Extreme Environments

20-EPN2-108: Ultrastructure and nano-geochemistry of organic materials in 3.4-billion-year-old...

Publications related to TA2.29 facilities and visits

Back to list of KBSI Facilities

Back to the TA2 Distributed Planetary Laboratory Facility Page

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