TA2 Facility 36 – Double Cs & monochromated TEM (South Korea)
Average visit: 7 days (16hr + 3 Focused Ion Beams)
Features:
- Resolution
– STEM resolution: 0.063 nm
– TEM resolution: 0.063 nm - Energy Resolution: 0.1 eV in EELS
- Electron Optics: Accel. Volt. 60 to 300 kV
- EDX detection Limit: 1 atm%
Application:
- High Spatial Resolution Spectrum Imaging for Nano Film and Nano Object[Catalysis CoreShell particle]
- Chemical Bonding Analysis for HfO2 Dielectrics
- Low Dose TEM for Organic Crystal
- Atomic Resolution STEM confocal Imaging for dislocation in GaN
- Identification of amorphous structure
Contact:
Dr. Keewook Yi, KBSI
Email: kyi[at]kbsi.re.kr
Website: WOLF portal information
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